주요특징

• The footprint of the SU1510 has been reduced by 20% so that the microscope can be installed in more restricted places than before.
• To assist inexperienced users the SU1510 includes an on screen operation guide that walks the user step by step through the complete imaging process-from vacuum mode selection to taking a picture.
• Variable pressure mode for observation of non-conductive samples without the need for metal coating.
• High throughput, less floor space, less electric power consumption, with no cooling water requirement due to TMP evacuation system.

주요특징

• The SU3500 employs a new low-aberration objective lens and improved bias function that provides higher emission current at low kV. 7nm SE Image Resolution at 3kV, 10nm BSE Image resolution at 5kV.
• Unparalleled Image Quality : Novel and innovative electron optics and image display rendering engine
• Robustness & Versatility : Image observation and analysis without traditional specimen preparation techniques
• Intuitive Operation : Delegation technology affords easy operation and increased throughput efficiency
• Multi-Functional, Automated Specimen Stage : Enhanced navigation via new analytical chamber and automated stage functions
• The newly designed vacuum system enables low vacuum settings within the range of 6-650Pa
• The new Ultra Variable-pressure Detector(UVD)* is a highly sensitive detector for low vacuum mode, which is optimized for imaging surface details at low acceleration voltages.
• The new Live Stereoscopic function* provides real time 3D-SEM image without need for specimen tilting.

주요특징

• Large sample up to 300mm in diameter
• Observable area up to 203mm in diameter
• Observation and EDS analysis on a sample up to 110mm tall and 2kg weight
• EDS, EBSD and WDS simultaneously available
• Versatile port layout for various analytical applications
• 5-axis computer eucentric motorized stage with -20˚/+90˚ tilt
• One-button selectable High Vacuum/Low Vacuum Modes
• Ecological design by clean Turbo Molecular Pumping