HITACHI 전자현미경
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SU1510

주요특징

  • The footprint of the SU1510 has been reduced by 20% so that the microscope can be installed in more restricted places than before.
  • To assist inexperienced users the SU1510 includes an on screen operation guide that walks the user step by step through the complete imaging process-from vacuum mode selection to taking a picture.
  • Variable pressure mode for observation of non-conductive samples without the need for metal coating.
  • High throughput, less floor space, less electric power consumption, with no cooling water requirement due to TMP evacuation system.

제품사양(Specification)

(1) Resolution
SE : 3.0nm at 30kV (High Vacuum Mode)
BSE : 4.0nm at 30kV (Low Vacuum Mode)
(2) Magnification
x5 to x300,000 (continuous)
(3) Accelerating voltage
0.3 to 30kV
(4) Bias system
Quadrant bias system (HITACHI patent)
(5) Detectors
Everhart Thornley Secondary Electron Detector
High sensitivity 5 segments BSE detector
(6) Low Vacuum Range
6 to 270Pa through graphic menu
(7) Maximum loading sample size
153mm dia. X 60mm H
(8) Image saving
Max. 5,120 x 3,840 pixels

SU3500

주요특징

  • The SU3500 employs a new low-aberration objective lens and improved bias function that provides higher emission current at low kV. 7nm SE Image Resolution at 3kV, 10nm BSE Image resolution at 5kV.
  • Unparalleled Image Quality : Novel and innovative electron optics and image display rendering engine
  • Robustness & Versatility : Image observation and analysis without traditional specimen preparation techniques
  • Intuitive Operation : Delegation technology affords easy operation and increased throughput efficiency
  • Multi-Functional, Automated Specimen Stage : Enhanced navigation via new analytical chamber and automated stage functions
  • The newly designed vacuum system enables low vacuum settings within the range of 6-650Pa
  • The new Ultra Variable-pressure Detector(UVD)* is a highly sensitive detector for low vacuum mode, which is optimized for imaging surface details at low acceleration voltages.
  • The new Live Stereoscopic function* provides real time 3D-SEM image without need for specimen tilting.

제품사양(Specification)

(1) Resolution
SE : 3.0nm at 30kV (High Vacuum Mode) / 7nm at 3kV (High Vacuum Mode)
BSE : 4.0nm at 30kV (Variable Pressure Mode) / 10.0nm at 5kV (High Vacuum Mode)
(2) Magnification
x5 to x300,000 (on photo)
x7 to x800,000 (on display)
(3) Accelerating voltage
0.3 to 30kV
(4) Bias system
Quadrant bias system (HITACHI patent)
(5) Detectors
Everhart Thornly Secondary Electron Detector
High sensitivity semiconductor BSE detector
(6) Low Vacuum Range
6 to 650Pa
(7) Maximum loading sample size
200mm dia. x 70mm H (4-axis)
200mm dia. x 80mm H (5-axis)
(8) Image saving
Max. 5,120 x 3,840 pixels

S-3700N

주요특징

  • Large sample up to 300mm in diameter
  • Observable area up to 203mm in diameter
  • Observation and EDS analysis on a sample up to 110mm tall and 2kg weight
  • EDS, EBSD and WDS simultaneously available
  • Versatile port layout for various analytical applications
  • 5-axis computer eucentric motorized stage with -20˚/+90˚ tilt
  • One-button selectable High Vacuum/Low Vacuum Modes
  • Ecological design by clean Turbo Molecular Pumping

제품사양(Specification)

(1) Resolution
SE : 3.0nm at 30kV (High Vacuum Mode) / 10nm at 3kV (High Vacuum Mode)
BSE : 4.0nm at 30kV (Low Vacuum Mode)
(2) Magnification
x5 to x300,000 (continuous)
(3) Accelerating voltage
0.3 to 30kV
(4) Bias system
Quadrant bias system (HITACHI patent)
(5) Detectors
Everhart Thornley Secondary Electron Detector
High sensitivity 5 segments BSE detector
(6) Low Vacuum Range
6 to 270Pa through graphic menu
(7) Specimen stage
X : 150mm
Y : 110mm
Z : 5 to 65mm
R : 360˚
T : -20˚ to +90˚
Maximum sample size : 300mm dia. X 110mm H
(8) Pumping system
TMP x 1 + R.P x 1
(9) Image saving
Max. 5,120 x 3,840 pixels